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Abstract submission
EUV2021 - Abstract Submission
Personal information
Title of contribution:
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Presenting author (surname, forename/initial(s)):
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Co-Authors (surname, forename/initial(s); etc.):
Name of Institution/company (affiliation of first author):
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Address of Institute/Company:
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E-Mail for further correspondence:
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Abstract
Please use our
word template
, alternatively you can upload a pdf file.
Abstract (plain Text, max. 2000 Characters):
upload formatted text (word file or pdf format, single page only, incl. graphics):
Presentation
Field of presentation (please select min. 1, max. 3):
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EUV Lithography
EUV Nano Metrology
Surfaces and Spectroscopy
Optical Material Properties
Space Instruments
Detectors
EUV and XUV Laboratory Sources and Instruments
Preferred presentation format (select one):
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oral presentation
poster presentation
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I agree that the abstract will be made available to the public via the seminar homepage.
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