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The seminar, the sixth in a series launched in 2011, is a forum for interdisciplinary exchange between basic and technology-oriented researchers and industrial users. The topics cover latest results from industrial applications of EUV radiation for lithography and measurement technology to developments for space-based VUV and EUV spectroscopy and the investigation of nano-structured surfaces.

Previous seminars: 201120132015, 2017, 2019

Questions about further information may be addressed to: euv2021


19 - 20 October 2021 full day: oral and poster sessions
on-site *) and as an online web conference

19 October 2021 evening: Get together Dinner *)
*) only if in accordance with the rules and measures against the corona virus


The meeting will take place in the Helmholtz-Building of the Berlin-Charlottenburg campus site of PTB (Abbestr. 2-12, 10587 Berlin). The historical PTB campus is located within walking distance from Kurfürstendamm and Bahnhof Zoologischer Garten, right in the heart of Berlin's 'City West'.

Confirmed invited speakers

M. van de Kerkhof, ASML          H. Enkisch, Carl Zeiss SMT         V. Philipsen, imec          T. Feigl, optiXfab

S. Gissot, ROB          K. Tiedtke, DESY          J. Feikes, HZB          S. Danylyuk, ILT          A. Szelghemi, IAP          H. Stiel, MBI

Supported by

If you are interested in sponsoring this event, please use the contact link to let us know.