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The seminar, the sixth in a series launched in 2011, is a forum for interdisciplinary exchange between basic and technology-oriented researchers and industrial users. The topics cover latest results from industrial applications of EUV radiation for lithography and measurement technology to developments for space-based VUV and EUV spectroscopy and the investigation of nano-structured surfaces.

Previous seminars: 201120132015, 2017, 2019

Questions about further information may be addressed to: euv2021


Abstract submission open until 30 July 2021
18 October 2021
PTB Adlershof laboratory visit
19 - 20 October 2021 full day: oral and poster sessions, 317. PTB-Seminar in Berlin

Get-together Dinner on the evening of 19 October 2021


The meeting will take place in the Helmholtz-Building of the Berlin-Charlottenburg campus site of PTB (Abbestr. 2-12, 10587 Berlin). The historical PTB campus is located within walking distance from Kurfürstendamm and Bahnhof Zoologischer Garten, right in the heart of Berlin's 'City West'.

Confirmed invited speakers

M. van de Kerkhof, ASML          H. Enkisch, Carl Zeiss SMT         V. Philipsen, imec          T. Feigl, optiXfab

S. Gissot, ROB          K. Tiedtke, DESY          J. Feikes, HZB          S. Danylyuk, ILT          A. Szelghemi, IAP          H. Stiel, MBI

Supported by

If you are interested in sponsoring this event, please use the contact link to let us know.