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Important dates

317. PTB Seminar VUV and EUV Metrology "EUV2021"October 19-20, 2021
 
Start of pre-registrationJanuary 25, 2021
Call for abstracts
Call for papers

2nd call for papers
April 6, 2021
Abstract submission deadline
EUV2021 abstract template
July 30, 2021
Final programmeSeptember 1, 2021
  
Start of registration
Registration deadline
July 9, 2021
September 15, 2021