Important dates
| 317. PTB Seminar VUV and EUV Metrology "EUV2021" | October 19-20, 2021 |
| Start of pre-registration | January 25, 2021 |
| Call for abstracts Call for papers 2nd call for papers | April 6, 2021 |
| Abstract submission closed EUV2021 abstract template | July 30, 2021 |
| Final programme | September 1, 2021 |
| Start of registration Registration deadline | July 9, 2021 September 15, 2021 |